Heylen, NancyNancyHeylenSinapi, FabriceFabriceSinapiTravaly, YoussefYoussefTravalyVereecke, GuyGuyVereeckeBaklanov, MikhaïlMikhaïlBaklanovCarbonell, LaureLaureCarbonellVan Hoeymissen, JanJanVan HoeymissenHellin, DavidDavidHellinHernandez, Jose LuisJose LuisHernandez2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12292Impact of direct CMP on surface and bulk properties of high porosity low-k materialsProceedings paper