Petersen, DirchDirchPetersenHansen, OleOleHansenHansen, TorbenTorbenHansenBoggild, PeterPeterBoggildLin, RongRongLinKjaer, DanielDanielKjaerNielsen, Peter F.Peter F.NielsenClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstRosseel, ErikErikRosseelBennett, NickNickBennettCowern, NickNickCowern2021-10-182021-10-1820101071-1023https://imec-publications.be/handle/20.500.12860/17797Review of electrical characterization of ultra-shallow junctions with micro four-point probesJournal article