Delabie, AnneliesAnneliesDelabieJayachandran, SuseendranSuseendranJayachandranCaymax, MattyMattyCaymaxLoo, RogerRogerLooMaggen, JensJensMaggenPourtois, GeoffreyGeoffreyPourtoisDouhard, BastienBastienDouhardConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautLenka, HaraHaraLenkaVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-10-212021-10-212013-092162-8726https://imec-publications.be/handle/20.500.12860/22248Epitaxial chemical vapor deposition of silicon on an oxygen monolayer on Si(100) substratesJournal article