Singanamalla, RaghunathRaghunathSinganamallaYu, HongYuHongYuYuJanssens, TomTomJanssensKubicek, StefanStefanKubicekDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162007-03https://imec-publications.be/handle/20.500.12860/12915The study of effective work function modulation by As ion implantation in TiN/TaN/HfO2 stacks.Journal article