Oya, Y.Y.OyaOkubora, A.A.Okuboravan Spengen, MerlijnMerlijnvan SpengenSoussan, PhilippePhilippeSoussanStoukatch, SergueiSergueiStoukatchRottenberg, XavierXavierRottenbergRatchev, PetarPetarRatchevTilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe RaedtBeyne, EricEricBeyneDe Moor, PietPietDe MoorDe Wolf, IngridIngridDe WolfBaert, KrisKrisBaert2021-10-152021-10-152004-12https://imec-publications.be/handle/20.500.12860/9377A reliable and compact polymer-based package for capacitive RF-MEMS switchesProceedings paper