High-energy boron-implantation and proton-irradiation effects in diodes with shallow trench isolation

Poyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysHayama, KiyoteruKiyoteruHayamaKobayashi, K.K.KobayashiOhyama, HidenoriHidenoriOhyamaTakizawa, H.H.TakizawaKokkoris, M.M.KokkorisKossionides, E.E.KossionidesFanourakis, G.G.FanourakisMohammadzadeh, A.A.Mohammadzadeh2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4673High-energy boron-implantation and proton-irradiation effects in diodes with shallow trench isolationProceedings paper