A CMOS Neural Probe with 1280 Electrodes and 88 Emission Sites Featuring Thermo-Optic Switching and On-Chip Calibration for Dual-Wavelength Optogenetics

Yang, XiaolinXiaolinYangNeutens, PieterPieterNeutensHumblet, AlexisAlexisHumbletSawigun, ChuthamChuthamSawigunO'Callaghan, JohnJohnO'CallaghanGeurts, ThijsThijsGeurtsLi, ZheyiZheyiLiGubin, YaroslavYaroslavGubinDe Munck, KoenKoenDe MunckTilmans, HarrieHarrieTilmansDe Proft, AnabelAnabelDe ProftDutta, BarundebBarundebDuttaMora Lopez, CarolinaCarolinaMora Lopez2026-07-162026-07-162026979-8-3315-8937-00193-6530https://imec-publications.be/handle/20.500.12860/59879We present a waveguide-based optogenetics neural probe with 1,280 electrodes, 384 recording channels, and 88 emission sites enabled by dual-layer silicon photonics. Thermo-optic switches are controlled by a custom photonic driver IC, while integrated tap couplers with photodiodes and a temperature sensor provide on-chip calibration and thermal monitoring. The probe achieves a large number of recording and emission sites, enabling reliable large-scale, cell-type-specific optogenetic studies.engA CMOS Neural Probe with 1280 Electrodes and 88 Emission Sites Featuring Thermo-Optic Switching and On-Chip Calibration for Dual-Wavelength OptogeneticsProceedings paper10.1109/isscc49663.2026.11409263WOS:001760995900258SILICON PROBES