Lofrano, MelinaMelinaLofranoVarela Pedreira, OlallaOlallaVarela PedreiraCiofi, IvanIvanCiofiOprins, HermanHermanOprinsPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2023-01-192022-05-052023-01-1920212380-632XWOS:000784773200058https://imec-publications.be/handle/20.500.12860/39738Joule heating investigation for advanced interconnect schemes with airgapsProceedings paper10.1109/IITC51362.2021.9537558978-1-7281-7632-1WOS:000784773200058