ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursors

Schaekers, MarcMarcSchaekersOpsomer, KarlKarlOpsomerRampelberg, GeertGeertRampelbergDeduytse, DavyDavyDeduytseDetavernier, ChristopheChristopheDetavernierBlasco, NicolasNicolasBlascoZauner, AndyAndyZauner2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17955ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursorsOral presentation