Process window discovery, expansion and control of design hotspots susceptible to overlay failures

Sah, KaushikKaushikSahCross, AndrewAndrewCrossMani, AntonioAntonioManiVan Den Heuvel, DieterDieterVan Den HeuvelFoubert, PhilippePhilippeFoubert2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29350Process window discovery, expansion and control of design hotspots susceptible to overlay failuresProceedings paperhttps://ieeexplore.ieee.org/document/7969272/