Nguyen, N.D.N.D.NguyenSouriau, LaurentLaurentSouriauShimizu, Y.Y.ShimizuJiang, SijiaSijiaJiangRosseel, ErikErikRosseelEveraert, Jean-LucJean-LucEveraertMoussa, AlainAlainMoussaClarysse, TrudoTrudoClarysseLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19480N-type and p-type ultra shallow junctions by atomic layer epitaxy and laser annealOral presentation