Influence of immersion lithography on wafer edge defectivity

Pollentier, IvanIvanPollentierSomanchi, A.A.SomanchiBurkeen, F.F.BurkeenVedula, S.S.Vedula2021-10-172021-10-172008-020038-111Xhttps://imec-publications.be/handle/20.500.12860/14322Influence of immersion lithography on wafer edge defectivityJournal articlehttp://sst.pennnet.com/display_article/319146/5/ARTCL/none/none/1/Influence-of-immersion-lithography-on-wafer-edge-defectivity/