Phame: phase measurements on 45nm node phase shift features

Buttgereit, UteUteButtgereitBirkner, RobertRobertBirknerSeidel, DirkDirkSeidelPerlitz, SachaSachaPerlitzPhilipsen, VickyVickyPhilipsenDe Bisschop, PeterPeterDe Bisschop2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13467Phame: phase measurements on 45nm node phase shift featuresProceedings paper