High performance large-area polymeric PMUT phased arrays in air

Chare, ChristopherChristopherChareGijsenbergh, PieterPieterGijsenberghJeong, YongbinYongbinJeongHeremans, PaulPaulHeremansGenoe, JanJanGenoeCheyns, DavidDavidCheyns2023-03-242023-02-042023-03-2420221948-5719WOS:000896080400227https://imec-publications.be/handle/20.500.12860/41059High performance large-area polymeric PMUT phased arrays in airProceedings paper10.1109/IUS54386.2022.9957829978-1-6654-6657-8WOS:000896080400227