De Wolf, IngridIngridDe WolfPozzat, G.G.PozzatPinardi, KuntjoroKuntjoroPinardiHoward, DaveDaveHowardIgnat, M.M.IgnatJain, SureshSureshJainMaes, HermanHermanMaes2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1177Experimental validation of mechanical stress models by micro-Raman spectroscopyProceedings paper