John, JoachimJoachimJohnBeaucarne, GuyGuyBeaucarneChoulat, PatrickPatrickChoulatMa, Y.Y.MaRussell, R.R.RussellRomijn, I.G.I.G.RomijnLamers, M.W.P.E.M.W.P.E.LamersMewe, A.A.A.A.MeweWeeber, A.A.WeeberHofmann, M.M.HofmannPreu, R.R.PreuGautero, L.L.GauteroSlaoui, A.A.SlaouiLe Quang, N.N.Le QuangNichiporuk, O.O.Nichiporukdel Canizo, C.C.del CanizoPan, A.A.PanSolheim, H.H.SolheimEvju, J.J.EvjuNagel, H.H.NagelBitnar, B.B.BitnarHeemeier, M.M.HeemeierWeber, T.T.WeberKaes, M.M.KaesRaabe, B.B.RaabeHaverkamp, H.H.HaverkampStrümpel, C.C.StrümpelHahn, G.G.Hahn2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15543Proceedings paper