Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviour

Kaushik, VidyaVidyaKaushikRöhr, ErikaErikaRöhrDe Gendt, StefanStefanDe GendtDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtClaes, MartineMartineClaesShimamoto, YasuhiroYasuhiroShimamotoRagnarsson, Lars-AkeLars-AkeRagnarssonWitters, ThomasThomasWittersManabe, Y.Y.ManabeHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7723Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviourProceedings paper