Libezny, MilanMilanLibeznyCaymax, MattyMattyCaymaxBrablec, A.A.BrablecKubena, J.J.KubenaHoly, V.V.HolyPoortmans, JefJefPoortmansNijs, JohanJohanNijsVanhellemont, JanJanVanhellemont2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/723Spectroellipsometric characterisation of thin epitaxial Si1-x Gex layersJournal article