Tsigkourakos, MenelaosMenelaosTsigkourakosVandervorst, WilfriedWilfriedVandervorstHantschel, ThomasThomasHantschelFranquet, AlexisAlexisFranquetConard, ThierryThierryConardCarbonell, LaureLaureCarbonell2021-10-202021-10-2020121071-1023https://imec-publications.be/handle/20.500.12860/21646Void detection in copper interconnects using energy dispersive X-ray spectroscopyJournal article