Poyai, AmpornAmpornPoyaiSimoen, EddyEddySimoenClaeys, CorCorClaeysRooyackers, RitaRitaRooyackersBadenes, GonçalGonçalBadenes2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5592Lifetime study in advanced isolation techniquesJournal article