Cirino, GiuseppeGiuseppeCirinoMansano, RonaldoRonaldoMansanoVerdonck, PatrickPatrickVerdonckCescato, LucilaLucilaCescatoMarega, E.E.MaregaGoncalves Neto, LuizLuizGoncalves Neto2021-10-172021-10-172009-09https://imec-publications.be/handle/20.500.12860/15100Phase-shift photomask designed by scalar diffractiontheoryProceedings paper