Rasadujjaman, MMRasadujjamanNakamura, Y.Y.NakamuraWatanabe, M.M.WatanabeKondoh, E.E.KondohBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25803Supercritical CO2 etching of metal thin films for magnetoresistive memory processingMeeting abstract