Challenges in LER/CDU metrology in DSA: placement error and cross-line correlations

Constantoudis, VassiliosVassiliosConstantoudisKuppuswamy, V.K.M.V.K.M.KuppuswamyGogolides, EvangelosEvangelosGogolidesVaglio Pret, AlessandroAlessandroVaglio PretPathangi Sriraman, HariHariPathangi SriramanGronheid, RoelRoelGronheid2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26476Challenges in LER/CDU metrology in DSA: placement error and cross-line correlationsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2508357