Wood, ObertObertWoodWong, KeithKeithWongParks, ValentinValentinParksKearney, PatrickPatrickKearneyMeyer-Ilse, JuliaJuliaMeyer-IlseLuong, VuVuLuongPhilipsen, VickyVickyPhilipsenFaheem, MohammadMohammadFaheemLiang, YifanYifanLiangKumar, AjayAjayKumarChen, EstherEstherChenBennett, CorbinCorbinBennettBianzhu, FuFuBianzhuGribelyuk, MichaelMichaelGribelyukZhao, WayneWayneZhaoMangat, PawitterPawitterMangatvan der Heide, PaulPaulvan der Heide2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27598Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasksProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2505797