Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phase

Armini, SilviaSilviaArminiLoyo Prado, JanaJanaLoyo PradoKrishtab, MikhailMikhailKrishtabSwerts, JohanJohanSwertsVerdonck, PatrickPatrickVerdonckMeersschaut, JohanJohanMeersschautConard, ThierryThierryConardBlauw, MichielMichielBlauwStruyf, HerbertHerbertStruyfBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220140167-9317https://imec-publications.be/handle/20.500.12860/23504Pore sealing of k 2.0 dielectrics assisted by self-assembled monolayers deposited from vapor phaseJournal articlehttp://www.sciencedirect.com/science/article/pii/S016793171300590X