Impact of enhanced localized degradation on time-to-breakdown in high-k oxides

Kauerauf, ThomasThomasKaueraufRoussel, PhilippePhilippeRousselDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9114Impact of enhanced localized degradation on time-to-breakdown in high-k oxidesOral presentation