Optimization of the crystallization phase of rare-earth aluminates for blocking dielectric application in TANOS type Flash memories

Breuil, LaurentLaurentBreuilAdelmann, ChristophChristophAdelmannVan den Bosch, GeertGeertVan den BoschCacciato, AntonioAntonioCacciatoZahid, MohammedMohammedZahidToledano Luque, MariaMariaToledano LuqueSuhane, AmitAmitSuhaneArreghini, AntonioAntonioArreghiniDegraeve, RobinRobinDegraeveVan Elshocht, SvenSvenVan ElshochtDebusschere, IngridIngridDebusschereKittl, JorgeJorgeKittlJurczak, GosiaGosiaJurczakVan Houdt, JanJanVan Houdt2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16801Optimization of the crystallization phase of rare-earth aluminates for blocking dielectric application in TANOS type Flash memoriesProceedings paper