Measurement, modelling and simulation of defects in as-grown Czrochalski silicon

Vanhellemont, JanJanVanhellemontSenkader, S.S.SenkaderKissinger, G.G.KissingerHiggs, V.V.HiggsTrauwaert, Marie-AstridMarie-AstridTrauwaertGraef, D.D.GraefLambert, U.U.LambertWagner, PatrickPatrickWagner2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2272Measurement, modelling and simulation of defects in as-grown Czrochalski siliconJournal article