Sah, KaushikKaushikSahCross, AndrewAndrewCrossDas, SayantanSayantanDasBlanco, VictorVictorBlancoKljucar, LukaLukaKljucarHalder, SandipSandipHalderLeray, PhilippePhilippeLeray2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37134Defect characterization of EUV Self-Aligned Litho-Etch Litho-Etch (SALELE) patterning scheme for advanced nodesProceedings paperhttps://doi.org/10.1117/12.2585779