Methods to measure mechanical properties of NEMS and MEMS: challenges and pitfalls

De Wolf, IngridIngridDe WolfKalicinski, StanislawStanislawKalicinskiDe Coster, JeroenJeroenDe CosterOprins, HermanHermanOprins2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15195Methods to measure mechanical properties of NEMS and MEMS: challenges and pitfallsProceedings paper