Baklanov, MikhaïlMikhaïlBaklanovMannaert, GeertGeertMannaertVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3208Low temperature oxidation and selective etching of CVD SiC filmsOral presentation