Higher-k ALD Sr-rich SrTiO3 for DRAM MIMCAP Application

Tomida, KazuyukiKazuyukiTomidaSwerts, JohanJohanSwertsPopovici, Mihaela IoanaMihaela IoanaPopoviciKaczer, BenBenKaczerClima, SergiuSergiuClimaPawlak, MalgorzataMalgorzataPawlakKim, Min-SooMin-SooKimAfanasiev, ValeriValeriAfanasievKittl, JorgeJorgeKittlJurczak, GosiaGosiaJurczak2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23179Higher-k ALD Sr-rich SrTiO3 for DRAM MIMCAP ApplicationMeeting abstracthttps://www.nims.go.jp/nimsconf/2013/DetailedProgram.html