Characterization of optical end-point detection for via reveal processing

Rassoul, NouredineNouredineRassoulJourdain, AnneAnneJourdainTutunjyan, NinaNinaTutunjyanDe Vos, JoeriJoeriDe VosSardo, StefanoStefanoSardoPiumi, DanieleDanielePiumiMiller, AndyAndyMillerBeyne, EricEricBeyneWalsby, EdwardEdwardWalsbyAshraf, HumaHumaAshrafThomas, DaveDaveThomas2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31628Characterization of optical end-point detection for via reveal processingProceedings paperhttps://ieeexplore.ieee.org/document/8429695