Roelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-04https://imec-publications.be/handle/20.500.12860/12788SOI grating structure for perfectly vertical fiber couplingProceedings paper