Comparison of three methods to measure the internal pressure of empty MEMS packages

Wang, BoBoWangTanaka, ShujiShujiTanakaDe Coster, JeroenJeroenDe CosterSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouwWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21828Comparison of three methods to measure the internal pressure of empty MEMS packagesProceedings paper