SSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacers

Eyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonStuer, CindyCindyStuerDe Wolf, IngridIngridDe WolfRooyackers, RitaRitaRooyackersClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstBadenes, GonçalGonçalBadenes2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5287SSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacersProceedings paper