Shallow boron implantations in Ge and the role of the pre-amorphization depth

Simoen, EddyEddySimoenBrouwers, GijsGijsBrouwersSatta, AlessandraAlessandraSattaDavid, M.L.M.L.DavidPailloux, F.F.PaillouxParmentier, BrigitteBrigitteParmentierClarysse, TrudoTrudoClarysseGoossens, JozefienJozefienGoossensVandervorst, WilfriedWilfriedVandervorstMeuris, MarcMarcMeuris2021-10-172021-10-1720081369-8001https://imec-publications.be/handle/20.500.12860/14469Shallow boron implantations in Ge and the role of the pre-amorphization depthJournal article