Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy

Watté, J.J.WattéProvoost, R.R.ProvoostSilverans, R. E.R. E.SilveransDe Wolf, IngridIngridDe WolfMaes, HermanHermanMaes2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/1009Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman SpectroscopyOral presentation