Physical failure analysis to distinguish EOS and ESD failures

Tung, Chih HangChih HangTungCheng, Cheng KouCheng KouChengRadhakrishnan, M.K.M.K.RadhakrishnanMahadeva Iyer, NatarajanNatarajanMahadeva Iyer2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6896Physical failure analysis to distinguish EOS and ESD failuresProceedings paper