A primal/dual approach for the accurate evaluation of the electromechanical coupling in MEMS

Rochus, VeroniqueVeroniqueRochusGeuzaine, ChristopheChristopheGeuzaine2021-10-202021-10-2020120168-874Xhttps://imec-publications.be/handle/20.500.12860/21401A primal/dual approach for the accurate evaluation of the electromechanical coupling in MEMSJournal article