Caymax, MattyMattyCaymaxDelhougne, RomainRomainDelhougneLoo, RogerRogerLooEneman, GeertGeertEnemanVerheyen, PeterPeterVerheyen2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10196Characteristics and integration of selectively grown strain-relaxed SiGe buffer layersOral presentation