Armigliato, A.A.ArmigliatoHoward, DaveDaveHowardBalboni, R.R.BalboniFrabboni, S.S.FrabboniCaymax, MattyMattyCaymax2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2346On the spatial resolution in analytical electron microscopyJournal article