Stoffels, SteveSteveStoffelsGeens, KarenKarenGeensZhao, MingMingZhaoLiang, HuHuLiangVan Hove, MarleenMarleenVan HoveDecoutere, StefaanStefaanDecoutere2021-10-242021-10-242017-05https://imec-publications.be/handle/20.500.12860/29509Next generation 200mm substrates for GaN power devicesProceedings paper