Impact of finite laser bandwidth on the critical dimension of L/S structures

De Bisschop, PeterPeterDe BisschopLalovic, IvanIvanLalovicTrintchouk, FedorFedorTrintchouk2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13594Impact of finite laser bandwidth on the critical dimension of L/S structuresJournal article