Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy

De Wolf, PeterPeterDe WolfStephenson, RobertRobertStephensonTrenkler, ThomasThomasTrenklerClarysse, TrudoTrudoClarysseHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4292Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopyJournal article