Leys, FrederikFrederikLeysHikavyy, AndriyAndriyHikavyyMachkaoutsan, VladimirVladimirMachkaoutsanDe Vos, BrechtBrechtDe VosGeenen, LucLucGeenenVan Daele, BennyBennyVan DaeleLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-172021-10-1720080040-6090https://imec-publications.be/handle/20.500.12860/14017Low temperature epitaxy and the importance of moisture controlJournal article