Electron trap energy distribution in ALD Al2O3, LaAl4Ox, and GdyAl2-yO3 layers on silicon

Wang, MugwortMugwortWangBadylevich, M.M.BadylevichAdelmann, ChristophChristophAdelmannSwerts, JohanJohanSwertsKittl, JorgeJorgeKittlAfanasiev, ValeriValeriAfanasiev2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21837Electron trap energy distribution in ALD Al2O3, LaAl4Ox, and GdyAl2-yO3 layers on siliconProceedings paperhttp://iopscience.iop.org/1757-899X/41/1/012008