Highly conformal fabrication of nanopatterns on non-planar surfaces

Massiot, InesInesMassiotTrompoukis, ChristosChristosTrompoukisLodewijks, KristofKristofLodewijksDepauw, ValerieValerieDepauwDmitriev, AlexandreAlexandreDmitriev2021-10-232021-10-2320162040-3364https://imec-publications.be/handle/20.500.12860/26977Highly conformal fabrication of nanopatterns on non-planar surfacesJournal articlehttp://pubs.rsc.org/en/content/articlelanding/2016/nr/c6nr00749j#!divAbstract