Capogreco, ElenaElenaCapogrecoLisoni, JuditJuditLisoniHikavyy, AndriyAndriyHikavyyArreghini, AntonioAntonioArreghiniVecchio, EmmaEmmaVecchioNumata, ToshinoriToshinoriNumataTan, Chi LimChi LimTanDe Meyer, KristinKristinDe MeyerVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23605SiGe channel formation for 3D vertical channel transistor applicationsMeeting abstracthttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=276&day=2014-09-16&year=2014&Itemid=99999999&id_season