Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel films

Murray, C.C.MurrayFlannery, C.C.FlanneryStreiter, I.I.StreiterSchulz, S. E.S. E.SchulzBaklanov, MikhaïlMikhaïlBaklanovMogilnikov, K. P.K. P.MogilnikovHimcinschi, C.C.HimcinschiFriedrich, M.M.FriedrichZahn, D. R. T.D. R. T.ZahnGessner, T.T.Gessner2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5501Comparison of techniques to characterize the density, porosity and elastic modules of porous low-k SiO2 xerogel filmsOral presentation